Some Vapor Phase Inhibitor Experiments
نویسندگان
چکیده
منابع مشابه
Collective Thomson scattering experiments on a tin vapor discharge in the prepinch phase.
Partially collective Thomson scattering measurements have been performed on a triggered vacuum arc in tin vapor, which is a candidate source of extreme ultraviolet light for application in semiconductor lithography. In this paper, results on the electron densities and temperatures are presented for the prepinch phase of the discharge. Electron densities and temperatures increase from 1 x 10(23)...
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ژورنال
عنوان ژورنال: CORROSION ENGINEERING DIGEST
سال: 1967
ISSN: 0010-9355,1884-1155
DOI: 10.3323/jcorr1954.16.5_213